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        1. Temptronic ThermoChuck
          閱讀數: 6213

          Temptronic ThermoChuck

          Temptronic ThermoChuck
          上海伯東美國 inTEST 旗下 Temptronic ThermoChuck 系統利用導電加熱和冷卻系統,搭配晶圓探針臺共同使用,提供 -65 至 +300°C 高低溫環境,適用晶圓 150 mm、200 mm、300 mm ,可用于激光微調 Laser Trim 和晶圓老化 Burn-in 測試,例如低泄漏探測(fA)和高電壓探測(10 kv),適用于晶圓、芯片在電高低溫環境下的特性描述、失效分析等。Temptronic ThermoChuck 適合各種廠牌晶圓探針臺,為確保兼容性,具體選型還請撥打客服熱線:021-50463511

          一、晶圓尺寸:150 和 200 mm

          ThermoChuck 型號

          溫度范圍°C

          冷卻

          加熱

          TP03000A

          -65 to +200°C

          Mechanical refrigeration, closed loop liquid cooling

          熱電

          TP03010A

          +20 to +200°C

          風冷/水冷*

          熱電

          TP03010B

          0 to +200°C

          Closed loop glycol/water cooling

          熱電

          TP03015A

          +30 to +200°C (+300ºC optional)

          風冷/水冷*

          電阻

          TP03015B

          +30 to +200°C (+300°C optional)

          Closed loop glycol/水冷

          電阻

          電壓 115V或 220V
          * 用戶提供冷卻介質

          二、晶圓尺寸:300 mm

          ThermoChuck 型號

          溫度范圍°C

          冷卻

          加熱

          TP03500A

          -55 to +200

          Mechanical refrigeration, closed loop liquid cooling

          電阻

          TP03500D

          +20 to +200

          Open loop air cooling with Vortex*

          電阻

          TP03500E

          +30 to +200

          Open loop air cooling*

          電阻

          電壓 220V
          * 用戶提供冷卻介質

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